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E-NZH-630 ,high-precision 6-degree-of-freedom ( Hexapod Motion Platform6-DOF) hexapod motion platform
Product Highlights
The E-NZH-630 6-axis displacement stage is a high-precision motion solution designed for demanding industrial and scientific applications, combining exceptional positioning accuracy, multi-axis flexibility, and robust mechanical performance.-
Multi-Axis Motion Control
It offers comprehensive 6-degree-of-freedom (6-DOF) control, including linear (X/Y/Z) and rotational (θX/θY/θZ) movements. With travel ranges of ±50 mm (X/Y), ±25 mm (Z), ±15° (θX/θY), and ±30° (θZ), it delivers full spatial manipulation for complex alignment tasks.
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Ultra-High Precision & Repeatability
Built for precision-critical workflows, the stage features repeatability down to ±0.1 µm (Z-axis) and ±1.5 µrad (θX/θY), with minimum step resolutions as fine as 1 µm (linear) and 10 µrad (rotational). Low backlash (0.2 µm for Z-axis, 4–8 µrad for rotational axes) ensures consistent, drift-free positioning.
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Balanced Speed & Dynamic Performance
Powered by permanent magnet synchronous motors, the stage achieves a maximum linear speed of 60 mm/s (typical: 40 mm/s) and rotational speed up to 700 mrad/s (typical: 480 mrad/s), enabling efficient alignment cycles without sacrificing accuracy.
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Reliable Load & Holding Capability
It supports a maximum load of 10 kg (horizontal orientation) / 3 kg (any direction), with a power-off holding force of 15 N / 5 N to secure positions during power interruptions, ensuring safety in sensitive setups.
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Robust Construction & Versatile Operation
Constructed from stainless steel and aluminum, the stage offers durability and stability across a wide operating temperature range of -10°C to +50°C. Its compact 12 kg design makes it suitable for integration into various systems without excessive footprint.
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E-NZH-610 ,high-precision 6-degree-of-freedom ( Hexapod Motion Platform6-DOF) hexapod motion platform
The E-NZH-610 is a compact, high-precision 6-degree-of-freedom (6-DOF) hexapod motion platform designed for multi-axis positioning and alignment applications. It delivers synchronized linear (X/Y/Z) and rotational (θX/θY/θZ) motion with sub-micron and sub-arc-second resolution, making it ideal for demanding precision tasks in optics, semiconductor manufacturing, metrology, and industrial automation.Built with a lightweight yet rigid stainless steel and aluminum structure, the SH-610 combines high stiffness with low mass (2.2 kg), enabling fast response and excellent dynamic performance in a compact footprint. -
E-EABT-D100 Air Bearing Rotary Table
EABT-D100 Economical Direct-Drive Air Bearing Rotary Table | Micron-Level Precision, High-Performance Without CompromiseBreak free from the limitations of traditional mechanical bearings. The EABT-D100 combines air bearing technology, a direct-drive motor, and high-resolution encoding to deliver ≤±2 sec repeatability and <0.8 µm runout in a compact package. With low air consumption and stable performance, it’s the cost-effective solution for optical inspection, semiconductor processing, and precision measurement.Short Taglines
- Frictionless air bearing + backlash-free direct drive: More stable accuracy, longer service life.
- 2000 rpm max speed + 1.5 Nm peak torque: Balances speed and load capacity.
- <0.8 µm runout + ±2 sec repeatability: Reliable precision for demanding applications.
- 8 NL/min low air consumption: Economical design, premium performance.
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USP-Mx Ultra-High Precision Air Bearing Rotary Stages
Ultra-High Precision & Unmatched Motion Stability
- Delivers industry-leading axial runout as low as 25nm and radial runout as low as 30nm across the series, with the largest M250/M200 models maintaining 25nm axial runout for ultra-smooth rotation.
- Achieves exceptional repeat positioning accuracy down to ±0.2 arcseconds (M200/M250), ensuring sub-micron level positioning consistency for the most demanding metrology and manufacturing applications.
- All runout and accuracy data is verified via lion standard ball + spindle error analyzer in a controlled laboratory environment, guaranteeing reliable, traceable performance.
- Axial runout and radial runout are measured in a laboratory environment using a Lion standard ball + spindle error analyzer.
- Load capacity is measured under 0.5 MPa gauge pressure.
- Stiffness is measured under central load with 0.5 MPa gauge pressure.
- Maximum speed can only be achieved with optional motor, grating ruler resolution, and corresponding driver support.
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μSCAN series of products Nano Scanning Stage μSCAN-1
μSCAN-1
The μSCAN series scanning system is a high-performance integrated system recently launched by our company. The whole machine uses high-rigidity granite as the base, cooperates with high-performance linear motors and servo platforms, and is mainly used for high-precision scanning, processing, testing and other applications. The selection of standard stroke parameters supports fast delivery, which greatly reduces the combination defects caused by the customer’s unfamiliarity with the combination and the performance shortcomings caused by the unfamiliarity with the debugging.
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Linear motor performance testing and Measurement system LMPMS-II
This domestically pioneering system measures various physical properties of linear motors. It employs an air-bearing guide rail and a high-performance servo motor traction system, combined with high-precision mechanical sensors and other types of sensors. This allows for automatic and continuous testing and data collection and statistical analysis to verify and evaluate the performance and consistency of linear motors.。
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Precision five-axis linkage motion system P5ALS-AB
P5ALS-AB Series Model P5ALS-200.90.360U200.200.A Product Introduction
The P5ALS-AB series is a new series of 5-axis precision motion systems launched by our company for high-precision 5-axis linkage processing or linkage detection and other high-demand industry applications. The system uses natural granite as the bed, welded integrated frame and air-floating precision vibration isolators, which can well isolate the various vibrations that the equipment is subjected to during use. At the same time, each linear axis uses the motion mechanism of the air-floating guide linear motor, and with the AC axis driven by the high-precision direct drive motor, it can obtain very high spatial positioning accuracy. This system also uses a motion control system that supports the RTCP tool tip following algorithm, which can very well complete some special trajectory calculations and controls. Main features of the P5ALS-AB series The XY axis uses air static pressure guide rails as the guide mechanism, which has very good straightness, flatness and pitch and yaw performance, which is the requirement and basis for high spatial positioning accuracy. All 5-axis systems use absolute value gratings as feedback, which can be used immediately after power-on, eliminating the time required for the incremental encoder of the multi-axis system to return to zero and greatly reducing errors. The Z axis uses a high-performance linear motor motion mechanism, and is equipped with a load-adjustable balance system and a brake mechanism, which greatly improves the reliability and safety of the equipment during movement. The AC axis uses a high-precision direct-drive motor and reducer, which can achieve high-precision motion while ensuring sufficient drive torque and stable accuracy. The AC axis can also be equipped with a higher-precision air-floating turntable or spindle. The default recommendation is to use the ACS motion control system, which supports RTCP tool tip following, five-axis linkage, GCODE and other functions, and has very good control effects and development scalability. BECKHOF
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E-ABRX-M250 High precision Aerostatic Rotary Stage
Surface metrology, including the measurement of roundness, flatness, and form error•Micro- and nanotomography•Beamline and synchrotron research•Precision manufacturing, including diamond turning, grinding and other high-performance machine toolapplications•Optical alignment, inspection and calibration systems•Engineered for Precision•The EABRX series is meticulously engineered to consistently satisfy even the most stringent performancerequirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level errormotion performance with high stiffness and load-carrying capabilities.1. Realize high-precision 360° continuous rotary displacement adjustment with nanometer/micron level positioning accuracy.
2. Provide ultra-low friction and non-contact rotation via aerostatic bearing, avoiding mechanical wear and backlash.
3. Support stepless speed regulation and precise angular positioning for different test and processing requirements.
4. Achieve stable load bearing under high-speed rotation, with excellent anti-vibration and runout suppression performance.
5. Enable quick zero reset and multi-position preset, realizing automatic and semi-automatic operation matching.
6. Equip with high-precision angle encoder for real-time position feedback and closed-loop control. -
E-ABRTE-M100 Air Bearing rotation stage
Surface metrology, including the measurement of roundness, flatness, and form error•Micro- and nanotomography•Beamline and synchrotron research•Precision manufacturing, including diamond turning, grinding and other high-performance machine toolapplications•Optical alignment, inspection and calibration systems•Engineered for Precision•The EABRX series is meticulously engineered to consistently satisfy even the most stringent performancerequirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level errormotion performance with high stiffness and load-carrying capabilities. -
EG-DL130 Series of biaxial XY nanostages dual-axis XY positioning Stage which uses dual linear motors to drive the lower axis and a single linear motor to drive the upper axis.
EG-DL130 Series of biaxial XY nanostages
Performance Characteristics
⚫ Integrated dual-axis XY linear motor motion platform
⚫ Driven by linear motors and equipped with high-precision crossed roller guides
⚫ Low side height, minimal Abbe error
⚫ Flatness and straightness throughout the entire stroke less than ±2μm
⚫ Excellent dynamic performance, dynamic following error less than ±30nm at a constant speed of 1mm/s
⚫ Resolution 1nm, bidirectional repeatability ±100nm to ±150nm, positioning accuracy ±250nm to 300nm
⚫ In-situ stability ±4nm (equipped with high-spec gratings and high-performance controllers)
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EG-DL Series XYZ Three-Axis Linear motor Stage
◆ Highly integrated XY linear motor nanoplatform
◆ Nanoscale performance and long stroke
◆ Low motion error and high stability accuracy
◆ Anti-creep characteristics
◆ High dynamic performance of direct drive technology
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Non-contact air bearing 360° continuous high-speed direct drive EG-ZAR Series a high-performance air-bearing direct-drive rotary table ，
Performance Characteristics
⚫ Non-contact air bearing, 360° continuous high-speed direct-drive rotary table
⚫ Direct-drive control by rotary motor
⚫ Angular accuracy ±2 arc sec, repeatability ±1 arc sec
⚫ Axial and radial runout less than 300nm
⚫ High-precision circular grating position feedback
