E-EABT-D100 Air Bearing Rotary Table

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E-EABT-D100 Air Bearing Rotary Table

Short Description:

EABT-D100 Economical Direct-Drive Air Bearing Rotary Table | Micron-Level Precision, High-Performance Without Compromise
Break free from the limitations of traditional mechanical bearings. The EABT-D100 combines air bearing technology, a direct-drive motor, and high-resolution encoding to deliver ≤±2 sec repeatability and <0.8 µm runout in a compact package. With low air consumption and stable performance, it’s the cost-effective solution for optical inspection, semiconductor processing, and precision measurement.

Short Taglines

  • Frictionless air bearing + backlash-free direct drive: More stable accuracy, longer service life.
  • 2000 rpm max speed + 1.5 Nm peak torque: Balances speed and load capacity.
  • <0.8 µm runout + ±2 sec repeatability: Reliable precision for demanding applications.
  • 8 NL/min low air consumption: Economical design, premium performance.


Product Detail

Specification

Product Tags

Ultra-Precise Direct-Drive Air Bearing Design

  • Air bearing technology eliminates mechanical friction and wear, ensuring ultra-smooth, maintenance-free operation for long-term stability.
  • Direct-drive motor removes backlash and transmission errors. With a 7872-line encoder, it delivers 0.82 sec resolution (optional 1 Vpp for higher precision) and ≤±2 sec repeatability, meeting sub-arc-second accuracy demands.
High Load Capacity & Stiffness
  • At 5 bar air pressure, axial load capacity reaches 210 N, and radial load capacity is 78 N, suitable for small precision workpieces and fixtures.
  • High axial stiffness (102 N/µm) and radial stiffness (38 N/µm), combined with <0.8 µm axial/radial runout, ensure vibration-free, stable performance even at high speeds.
Efficient & Cost-Effective Performance
  • Max speed up to 2000 rpm (encoder analog mode), with 0.68 Nm rated torque and 1.5 Nm peak torque, ideal for both high-speed positioning and medium-duty rotation tasks.
  • Low air consumption of only 8 NL/min, reducing long-term operating costs. Compatible with standard 5 bar factory air supplies for easy integration.
Compact & Integration-Friendly Build
  • Compact footprint (110×110×68 mm) with a 100 mm tabletop, a Ø20 mm through-hole, and standard M4 mounting holes for quick installation into multi-axis systems or custom equipment.
  • Economical pricing paired with high-end performance, making it a cost-effective air bearing solution for precision testing, optical inspection, and semiconductor applications.

2. Typical Applications

  1. Optics & Photonics Testing

    Ideal for angle calibration, eccentricity measurement, and transmittance testing of lenses, prisms, and optical components. The <0.8 µm runout and ±2 sec repeatability guarantee consistent, accurate results for optical inspection systems.

  2. Semiconductor & Precision Electronics

    Used for multi-station inspection and processing of wafers, chips, and PCBs. The direct-drive, zero-backlash design and high-speed capability meet the efficiency and precision requirements of semiconductor production lines, while the air bearing avoids contamination risks from traditional bearings.

  3. Precision Machining & Metrology

    Suitable for indexing machining, profile inspection, and CMM applications for small precision parts. High axial/radial stiffness resists minor external forces during machining or measurement, ensuring workpiece positioning accuracy and improving product yield.

  4. R&D & Academic Labs

    Perfect for high-precision rotation platforms in materials testing, physics experiments, and educational equipment. The compact form factor allows flexible experimental setups, and low air consumption adapts to laboratory air conditions, offering an optimal balance of performance and budget for research scenarios.


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  • Specification Parameter
    Model E-EABT-D100
    Type Direct-Drive Air Bearing Rotary Table
    Motor Torque 0.68 Nm (Rated) / 1.5 Nm (Peak)
    Max Speed 2000 rpm (Encoder Analog Mode)
    Encoder Lines 7872 line
    Encoder Resolution 0.82 sec (Optional 1 Vpp for higher resolution)
    Repeat Positioning Accuracy ≤ ±2 sec
    Axial Max Load (5 bar) 210 N
    Radial Max Load (5 bar) 78 N
    Axial Max Stiffness (5 bar) 102 N/µm
    Radial Max Stiffness (5 bar) 38 N/µm
    Axial Max Runout* < 0.8 µm
    Radial Max Runout* < 0.8 µm
    Air Consumption 8 NL/min
    Tabletop Diameter Ø100 mm
    Overall Dimensions 110 × 110 × 68 mm
    Central Through-Hole Ø20.00 mm
    Mounting Holes 6 × M4-6H, on Ø8.10 mm pitch circle
    Operating Air Pressure 5 bar (Standard)

     


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