FSMs sebelisa tšepe (aluminium kapa beryllium) kapa silicon carbide substrates ho itšetlehile ka litlhoko tse khethehileng tsa kopo.Re ka fana ka liipone tse nang le hoo e batlang e le tlhokahalo efe kapa efe ea ho roala ho tloha ho lirafshoa tsa tšepe tsa motheo ho ea ho li-dielectric tse khanyang tse entsoeng bakeng sa lisebelisoa tsa High Energy Laser (HEL).BlueHalo FSMs fana ka lebelo le phahameng;>10,000 radians/sec2 bakeng sa sehlopha sa rona sa 1”-2” sa FSM.Li-FSM tsa rona li fihlella li-bandwidth tse phahameng (> 1 kHz optical kapa boemo, ho latela boholo) 'me li fana ka jitter e tlase ea <1 µrad.
Boholo ba Seipone | 4 intshi | 6 intshi | 8inch | 10inch | ≥10inch | 4inch | 6 intshi | 8inch | 10inch | ≥10inch |
Qeto | 1 ho isa ho 3μrad | 3-5μrad | 1 ho isa ho 3μrad | |||||||
Bandwidth ea loop e koetsoeng | 100 ~ 300Hz (@1% leeto) | 10 - 200Hz (@1% leeto) | ||||||||
Mohato Karabo | 4 ~ 10ms (@1% maeto) | 3 ho isa ho 30ms (@1% leeto) | ||||||||
Angle Range | ≤ ± 25mRad | |||||||||
Pheta-pheta | ≤±5μrad | ≤±3 ~ ±10μrad | ||||||||
Mocheso oa ho sebetsa | -40 ℃ ~ 70 ℃ | |||||||||
Mocheso oa polokelo (℃) | -55 ℃ ~ 85 ℃ | |||||||||
Anti-vibration | GJB 150.16A-2009 | |||||||||
Anti-Impact | GJB 150.18A-2009 |